Electrostatic micro/nano manipulator with 6 D.O.F

Toshio Fukuda, Motohiro Fujiyoshi, Kazuhiro Kosuge, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V.

Original languageEnglish
Title of host publicationMicromechanical Sensors, Actuators, and Systems
PublisherPubl by ASME
Number of pages6
ISBN (Print)0791808637
Publication statusPublished - 1991
Externally publishedYes
EventWinter Annual Meeting of the American Society of Mechanical Engineers - Atlanta, GA, USA
Duration: 1991 Dec 11991 Dec 6

Publication series

NameAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC


OtherWinter Annual Meeting of the American Society of Mechanical Engineers
CityAtlanta, GA, USA

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering


Dive into the research topics of 'Electrostatic micro/nano manipulator with 6 D.O.F'. Together they form a unique fingerprint.

Cite this