Electrostatic micro/nano manipulator with 6 D.O.F

Toshio Fukuda; Motohiro Fujiyoshi; Kazuhiro Kosuge; Fumihito Arai

Electrostatic micro/nano manipulator with 6 D.O.F

Toshio Fukuda, Motohiro Fujiyoshi, Kazuhiro Kosuge, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10^-2 degree are attained with applied voltage of 350V.

Original language	English
Title of host publication	Micromechanical Sensors, Actuators, and Systems
Publisher	Publ by ASME
Pages	197-202
Number of pages	6
ISBN (Print)	0791808637
Publication status	Published - 1991
Externally published	Yes
Event	Winter Annual Meeting of the American Society of Mechanical Engineers - Atlanta, GA, USA Duration: 1991 Dec 1 → 1991 Dec 6

Publication series

Name	American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
Volume	32

Other

Other	Winter Annual Meeting of the American Society of Mechanical Engineers
City	Atlanta, GA, USA
Period	91/12/1 → 91/12/6

ASJC Scopus subject areas

Software
Mechanical Engineering

Cite this

Electrostatic micro/nano manipulator with 6 D.O.F. / Fukuda, Toshio; Fujiyoshi, Motohiro; Kosuge, Kazuhiro et al.
Micromechanical Sensors, Actuators, and Systems. Publ by ASME, 1991. p. 197-202 (American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC; Vol. 32).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fukuda, T, Fujiyoshi, M, Kosuge, K & Arai, F 1991, Electrostatic micro/nano manipulator with 6 D.O.F. in Micromechanical Sensors, Actuators, and Systems. American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC, vol. 32, Publ by ASME, pp. 197-202, Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, GA, USA, 91/12/1.

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abstract = "In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V.",

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AU - Fukuda, Toshio

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N2 - In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V.

AB - In this paper, we propose mechanism of an electrostatic micromanipulator with six-degree-of-freedom (6 D.O.F) and describe static characteristics of the prototype micromanipulator. Its main features are summarized as follows: (1) it is structurally very compact, since the actuator system is fabricated and assembled through the photoetching process; (2) the manipulator can move along three axes, and can also rotate around each axis(6 D.O.F). No backlash exists and it has subnanometer resolution. The sensing method of the tip motion is described and the static characteristics of the tip motion is measured. In the experiments, movable range of 3.15 micron and rotatable angle of 1.1×10-2 degree are attained with applied voltage of 350V.

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T3 - American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

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BT - Micromechanical Sensors, Actuators, and Systems

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T2 - Winter Annual Meeting of the American Society of Mechanical Engineers

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ER -

Electrostatic micro/nano manipulator with 6 D.O.F

Abstract

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ASJC Scopus subject areas

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