Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

D. Satoh; S. Tanaka; Masayoshi Esashi

Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

D. Satoh, S. Tanaka, Masayoshi Esashi

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper describes a microvalve to control liquefied gas in a micro fuel reforming system. To realize both high pressure leak tolerance and low pressure loss, a main valve is pneumatically actuated by the pressure of the liquefied gas itself, and its pneumatic actuation is controlled by two electrostatic sub-valves. The fabricated microvalve was tested in terms of pressure loss in open state, leakage in close state and driving voltage. The pressure loss was less than 10 Pa/sccm, which is sufficiently low for the application. The apparent leakage was not detected until the input pressure reaches 150 kPa gauge. The driving voltage of the sub-valve was 40 V.

Original language	English
Title of host publication	19th IEEE International Conference on Micro Electro Mechanical Systems
Pages	746-749
Number of pages	4
Publication status	Published - 2006 Oct 24
Event	19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey Duration: 2006 Jan 22 → 2006 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2006
ISSN (Print)	1084-6999

Other

Other	19th IEEE International Conference on Micro Electro Mechanical Systems
Country/Territory	Turkey
City	Istanbul
Period	06/1/22 → 06/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss. / Satoh, D.; Tanaka, S.; Esashi, Masayoshi.

19th IEEE International Conference on Micro Electro Mechanical Systems. 2006. p. 746-749 1627907 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Satoh, D, Tanaka, S & Esashi, M 2006, Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss. in 19th IEEE International Conference on Micro Electro Mechanical Systems., 1627907, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2006, pp. 746-749, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 06/1/22.

@inproceedings{864d27675ed0475bbabf8b457f2d82bf,

title = "Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss",

abstract = "This paper describes a microvalve to control liquefied gas in a micro fuel reforming system. To realize both high pressure leak tolerance and low pressure loss, a main valve is pneumatically actuated by the pressure of the liquefied gas itself, and its pneumatic actuation is controlled by two electrostatic sub-valves. The fabricated microvalve was tested in terms of pressure loss in open state, leakage in close state and driving voltage. The pressure loss was less than 10 Pa/sccm, which is sufficiently low for the application. The apparent leakage was not detected until the input pressure reaches 150 kPa gauge. The driving voltage of the sub-valve was 40 V.",

author = "D. Satoh and S. Tanaka and Masayoshi Esashi",

year = "2006",

month = oct,

day = "24",

language = "English",

isbn = "0780394755",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "746--749",

booktitle = "19th IEEE International Conference on Micro Electro Mechanical Systems",

note = "19th IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 22-01-2006 Through 26-01-2006",

}

TY - GEN

T1 - Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

AU - Satoh, D.

AU - Tanaka, S.

AU - Esashi, Masayoshi

PY - 2006/10/24

Y1 - 2006/10/24

N2 - This paper describes a microvalve to control liquefied gas in a micro fuel reforming system. To realize both high pressure leak tolerance and low pressure loss, a main valve is pneumatically actuated by the pressure of the liquefied gas itself, and its pneumatic actuation is controlled by two electrostatic sub-valves. The fabricated microvalve was tested in terms of pressure loss in open state, leakage in close state and driving voltage. The pressure loss was less than 10 Pa/sccm, which is sufficiently low for the application. The apparent leakage was not detected until the input pressure reaches 150 kPa gauge. The driving voltage of the sub-valve was 40 V.

AB - This paper describes a microvalve to control liquefied gas in a micro fuel reforming system. To realize both high pressure leak tolerance and low pressure loss, a main valve is pneumatically actuated by the pressure of the liquefied gas itself, and its pneumatic actuation is controlled by two electrostatic sub-valves. The fabricated microvalve was tested in terms of pressure loss in open state, leakage in close state and driving voltage. The pressure loss was less than 10 Pa/sccm, which is sufficiently low for the application. The apparent leakage was not detected until the input pressure reaches 150 kPa gauge. The driving voltage of the sub-valve was 40 V.

UR - http://www.scopus.com/inward/record.url?scp=33750125249&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33750125249&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33750125249

SN - 0780394755

SN - 9780780394759

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 746

EP - 749

BT - 19th IEEE International Conference on Micro Electro Mechanical Systems

T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 22 January 2006 through 26 January 2006

ER -

Electrostatically-controlled, self-pneumatically-actuated microvalve with high pressure tolerance and low pressure loss

Abstract

Publication series

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this