Mass-analysis scanning force microscopy is a kind of scanning force microscope (SFM) family, which equiped with a time-of-flight mass analyzer (TOF-MA). This microscopy will provide capability of surface imaging and chemical analysis, simultaneously. This letter presents microprobes with an electrostatic actuator to switch the measurement modes between surface imaging mode and mass analysis mode. Silicon cantilever, extranction electrode and electrosatic actuator with curved electrodes are fabricated on a Prexy glass. The cantilever is drived by stepwise pull-in phenomena. A large displacement of the cantilever can be obtained by the electrostatic actuation. Handling and releasing of latex beads are demonstrated using this probe.
- Electrostatic actuator
- Pull-in effect
- Time-of-flight mass analyzer scanning force microscopy