@article{27aac42d6a2b4d01a56ea3bde00e9674,
title = "Elucidation of mechanical polishing mechanism controlled by chemical reaction: Quantum chemical molecular dynamics simulation and first-principles calculation",
keywords = "Chemical mechanical polishing, Chemical reaction, First-principles calculation, Tight-binding quantum chemical molecular dynamics, Tribology simulation",
author = "Nobuki Ozawa and Kentaro Kawaguchi and Momoji Kubo",
year = "2013",
language = "English",
volume = "58",
pages = "616--621",
journal = "Toraibarojisuto/Journal of Japanese Society of Tribologists",
issn = "0915-1168",
publisher = "Japanese Society of Tribologists",
number = "9",
}