Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas

Tetsuo Maeda; Kazuaki Wagatsuma

doi:10.1016/j.microc.2003.11.010

Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas

Tetsuo Maeda, Kazuaki Wagatsuma

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

A high-powered, microwave-induced nitrogen-oxygen plasma (N ₂-O₂-MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N₂-O₂-MIP was in the range of 5100-5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.

Original language	English
Pages (from-to)	53-60
Number of pages	8
Journal	Microchemical Journal
Volume	76
Issue number	1-2
DOIs	https://doi.org/10.1016/j.microc.2003.11.010
Publication status	Published - 2004 Feb 1

Keywords

Excitation temperature
Intensity ratio of atomic line to ionic line
Microwave induced plasma
Okamoto cavity

ASJC Scopus subject areas

Analytical Chemistry
Spectroscopy

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10.1016/j.microc.2003.11.010

Cite this

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title = "Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas",

abstract = "A high-powered, microwave-induced nitrogen-oxygen plasma (N 2-O2-MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N2-O2-MIP was in the range of 5100-5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.",

keywords = "Excitation temperature, Intensity ratio of atomic line to ionic line, Microwave induced plasma, Okamoto cavity",

author = "Tetsuo Maeda and Kazuaki Wagatsuma",

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T1 - Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas

AU - Maeda, Tetsuo

AU - Wagatsuma, Kazuaki

PY - 2004/2/1

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N2 - A high-powered, microwave-induced nitrogen-oxygen plasma (N 2-O2-MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N2-O2-MIP was in the range of 5100-5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.

AB - A high-powered, microwave-induced nitrogen-oxygen plasma (N 2-O2-MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N2-O2-MIP was in the range of 5100-5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.

KW - Excitation temperature

KW - Intensity ratio of atomic line to ionic line

KW - Microwave induced plasma

KW - Okamoto cavity

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JO - Microchemical Journal

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Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen-oxygen mixture gas

Abstract

Keywords

ASJC Scopus subject areas

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