@article{14c7eea54a744cada294f93ce76d47e2,
title = "Energy control of neutral oxygen particles passing through an aperture electrode",
abstract = "The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber.",
keywords = "Beam energy, Neutralized plasma particle, Oxygen plasma",
author = "Takeo Ohno and Daiki Nakayama and Takeru Okada and Seiji Samukawa",
note = "Funding Information: Part of this work was supported by PRESTO, Japan Science and Technology Agency, Japan (Grant Number JPMJPR1325 ). The authors thank T. Ozaki for technical support with the neutral beam system. Publisher Copyright: {\textcopyright} 2017 The Authors",
year = "2018",
month = mar,
doi = "10.1016/j.rinp.2017.12.001",
language = "English",
volume = "8",
pages = "169--171",
journal = "Results in Physics",
issn = "2211-3797",
publisher = "Elsevier BV",
}