Energy saving in semiconductor fabs by out-air handling unit performance improvement

Hirokazu Suzuki, Hideo Hanaoka, Yoshinori Ohkubo, Yoshio Yamazaki, Yasuyuki Shirai, Tadahiro Ohmi

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)


This paper shows methods of energy saving. The energy consumed in semiconductor fabs is classified into two categories, the manufacturing system and the air conditioning. And the energy for the air conditioning is further classified into fresh air intake, recirculation (clean room) air conditioning and cooling system of the manufacturing system. Focused on the fresh air intake in summer, the moisture in the fresh air is condensed on a heat exchange-fin of the air-handling unit (AHU). This condensation decreases thermal exchange and increases intake-air resistance. Removal of it improves the performance. So we positively removed it, and 24% improvement of coefficient of heat exchange is achieved. Using this result, 5% of energy saving of the refrigerator is obtained. And the result is applied to all of the heating, ventilation, and air conditioning (HVAC) system, 3% energy saving is obtained.

Original languageEnglish
Pages (from-to)293-296
Number of pages4
JournalIEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings
Issue number1
Publication statusPublished - 2000
Event9th International Symposium on Semiconductor Manufacturing - Tokyo, Japan
Duration: 2000 Sept 262000 Sept 28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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