Abstract
This paper shows methods of energy saving. The energy consumed in semiconductor fabs is classified into two categories, the manufacturing system and the air conditioning. And the energy for the air conditioning is further classified into fresh air intake, recirculation (clean room) air conditioning and cooling system of the manufacturing system. Focused on the fresh air intake in summer, the moisture in the fresh air is condensed on a heat exchange-fin of the air-handling unit (AHU). This condensation decreases thermal exchange and increases intake-air resistance. Removal of it improves the performance. So we positively removed it, and 24% improvement of coefficient of heat exchange is achieved. Using this result, 5% of energy saving of the refrigerator is obtained. And the result is applied to all of the heating, ventilation, and air conditioning (HVAC) system, 3% energy saving is obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 293-296 |
| Number of pages | 4 |
| Journal | IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings |
| Issue number | 1 |
| Publication status | Published - 2000 |
| Event | 9th International Symposium on Semiconductor Manufacturing - Tokyo, Japan Duration: 2000 Sept 26 → 2000 Sept 28 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering