@article{7e0f324f31014917bb3b0fdb4b67285a,
title = "Engineering field application of micro-nano-bubble water",
keywords = "Evaluation, Micro-nano-bubble, Ozone, Photoresist removal, Semiconductor",
author = "Yasuyuki Shirai",
note = "Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",
year = "2017",
doi = "10.2493/jjspe.83.623",
language = "English",
volume = "83",
pages = "623--626",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "7",
}