Abstract
We studied the effects of hydrophilicity of Si surfaces on nanometer-scale anodic oxidation with atomic force microscopy (AFM). We found that nano-oxidation is greatly enhanced on a SC1-treated Si (111) surface, which is hydrophilic, compared with that on a hydrophobic HF-treated surface: The average height (average width) of the oxide line was 4.8 nm (550 nm) for the former surface and 1.9 nm (340 nm) for the latter one, for a bias voltage of 18 V and a scan rate of 2.3 μm/s. The enhanced nano-oxidation was reverted when the SC1-treated Si surface was modified with chlorotrimethylsilane.
| Original language | English |
|---|---|
| Pages (from-to) | 4754-4757 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 41 |
| Issue number | 7 A |
| DOIs | |
| Publication status | Published - 2002 Jul |
| Externally published | Yes |
Keywords
- AFM
- Anodic oxidation
- Hydrophilicity
- Nanofabrication
- Silicon
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)