TY - JOUR
T1 - Environmental Measurement Technology Using Multiple Internal Reflection FTIR
AU - Takayanagi, Fumikazu
AU - Endo, Miehiaki
AU - Maruo, Kazuyuki
AU - Yoshida, Haruo
AU - Niwano, Michio
PY - 2001
Y1 - 2001
N2 - Environmental sensor which can detect and identify environmental pollution in real time is needed. It could be made by using Multiple internal reflection FTIR(MIR-FTIR) because of its short measurement time and high sensitivity. We chose GaAs which transmits large band lights which many molecule vibration exist in. It is possible to identify the gas which exists in the atmosphere around the crystal by FTIR spectrums. It is also possible to measure concentration of the gas in the atmosphere by measuring peak intensity of it. The result of reproducibility experiment will be reported finally.
AB - Environmental sensor which can detect and identify environmental pollution in real time is needed. It could be made by using Multiple internal reflection FTIR(MIR-FTIR) because of its short measurement time and high sensitivity. We chose GaAs which transmits large band lights which many molecule vibration exist in. It is possible to identify the gas which exists in the atmosphere around the crystal by FTIR spectrums. It is also possible to measure concentration of the gas in the atmosphere by measuring peak intensity of it. The result of reproducibility experiment will be reported finally.
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U2 - 10.1541/ieejsmas.121.331
DO - 10.1541/ieejsmas.121.331
M3 - Article
AN - SCOPUS:85010163167
SN - 1341-8939
VL - 121
SP - 331
EP - 336
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
IS - 6
ER -