TY - JOUR
T1 - Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive
AU - Zhou, Zhen
AU - Yoshida, Shinya
AU - Tanaka, Shuji
N1 - Funding Information:
This work was partly supported by JSPS KAKENHI − Grant Number 16K17500 and the Asahi Glass Foundation . This work was also supported by the “Nanotechnology Platform” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan , at the Center for Integrated Nanotechnology Support, Tohoku University.
Publisher Copyright:
© 2017 Elsevier B.V.
PY - 2017/10/15
Y1 - 2017/10/15
N2 - In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A c-axis-oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) epitaxial thin film was employed as a piezoelectric transducer considering its outstanding figures-of-merit for SNR, due to the high piezoelectric coefficient and small relative permittivity (typical values: e31,f = −14C/m2, εr = 200–300). The pMUTs was based on an epitaxial PMnN-PZT/Si diaphragm structure and prototyped from a SOI substrate; its rangefinding ability was evaluated with a pair of devices, specifically, transmitter and receiver, respectively. As a result, the maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR. The energy consumption of the transmitter was as small as ∼5 nJ for the generation of a 50-cycle ultrasonic burst. The noise analysis of the receiver's charge amplifier circuit indicated that this system could be improved by the optimization of bandwidth and by eliminating external noise. We believe that this high performance pMUT rangefinder will be utilized in various applications of consumer electronics or as an alternative to the bulk piezoelectric ceramic rangefinder in the near future.
AB - In this study, we successfully developed a high signal-to-noise ratio (SNR) rangefinder based on a piezoelectric micromachined ultrasonic transducer (pMUT). A c-axis-oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) epitaxial thin film was employed as a piezoelectric transducer considering its outstanding figures-of-merit for SNR, due to the high piezoelectric coefficient and small relative permittivity (typical values: e31,f = −14C/m2, εr = 200–300). The pMUTs was based on an epitaxial PMnN-PZT/Si diaphragm structure and prototyped from a SOI substrate; its rangefinding ability was evaluated with a pair of devices, specifically, transmitter and receiver, respectively. As a result, the maximum range was estimated to be over 2 m at a low actuating voltage of 1 Vp-p, when 12 dB was set as the threshold SNR. The energy consumption of the transmitter was as small as ∼5 nJ for the generation of a 50-cycle ultrasonic burst. The noise analysis of the receiver's charge amplifier circuit indicated that this system could be improved by the optimization of bandwidth and by eliminating external noise. We believe that this high performance pMUT rangefinder will be utilized in various applications of consumer electronics or as an alternative to the bulk piezoelectric ceramic rangefinder in the near future.
KW - Pb(Mn,Nb)O-Pb(Zr,Ti)O (PMnN-PZT)
KW - pMUT
KW - PZT-Based epitaxial thin film
KW - Rangefinding
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U2 - 10.1016/j.sna.2017.09.058
DO - 10.1016/j.sna.2017.09.058
M3 - Article
AN - SCOPUS:85030638175
SN - 0924-4247
VL - 266
SP - 352
EP - 360
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
ER -
