Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Takashi Kuribara; Masahiro Yamaguchi; Ken Ichi Arai

doi:10.1109/TMAG.2002.802400

Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Takashi Kuribara, Masahiro Yamaguchi, Ken Ichi Arai

New Industry Creation Hatchery Center (NICHe)

Tohoku University

Research output: Contribution to journal › Conference article › peer-review

24 Citations (Scopus)

Abstract

An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co₈₅Nb₁₂Zr₃ film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.

Original language	English
Pages (from-to)	3159-3161
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	38
Issue number	5 I
DOIs	https://doi.org/10.1109/TMAG.2002.802400
Publication status	Published - 2002 Sept
Event	2002 International Magnetics Conference (Intermag 2002) - Amsterdam, Netherlands Duration: 2002 Apr 28 → 2002 May 2

Keywords

Ferromagnetic resonance
Inductors
Scattering parameters
Transmission line measurements

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10.1109/TMAG.2002.802400

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title = "Equivalent circuit analysis of an RF integrated ferromagnetic inductor",

abstract = "An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co85Nb12Zr3 film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.",

keywords = "Ferromagnetic resonance, Inductors, Scattering parameters, Transmission line measurements",

author = "Takashi Kuribara and Masahiro Yamaguchi and Arai, {Ken Ichi}",

year = "2002",

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language = "English",

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pages = "3159--3161",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

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note = "2002 International Magnetics Conference (Intermag 2002) ; Conference date: 28-04-2002 Through 02-05-2002",

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T1 - Equivalent circuit analysis of an RF integrated ferromagnetic inductor

AU - Kuribara, Takashi

AU - Yamaguchi, Masahiro

AU - Arai, Ken Ichi

PY - 2002/9

Y1 - 2002/9

N2 - An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co85Nb12Zr3 film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.

AB - An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co85Nb12Zr3 film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.

KW - Ferromagnetic resonance

KW - Inductors

KW - Scattering parameters

KW - Transmission line measurements

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SP - 3159

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JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

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T2 - 2002 International Magnetics Conference (Intermag 2002)

Y2 - 28 April 2002 through 2 May 2002

ER -

Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Abstract

Keywords

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