Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Takashi Kuribara, Masahiro Yamaguchi, Ken Ichi Arai

Research output: Contribution to journalConference articlepeer-review

24 Citations (Scopus)


An RF integrated air-core inductor and a ferromagnetic thin-film inductor having a ferromagnetic film on top of the spiral have been microfabricated. An equivalent circuit of the RF integrated spiral inductor with ferromagnetic film has been derived to analyze the contribution of the permeability of the magnetic film to the inductance of the inductor. The scattering parameters (S-parameters) have been measured to derive the equivalent circuit parameters of the inductors. Using the amorphous Co85Nb12Zr3 film with slots, the inductance increased and the capacitance between the magnetic film and the coil and between the magnetic film and the ground could be neglected up to 5 GHz.

Original languageEnglish
Pages (from-to)3159-3161
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number5 I
Publication statusPublished - 2002 Sept
Event2002 International Magnetics Conference (Intermag 2002) - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2


  • Ferromagnetic resonance
  • Inductors
  • Scattering parameters
  • Transmission line measurements


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