@article{081a8bba1b9c47b6a983020ba1fef284,
title = "Erratum: Study on the adhesion strength of CVD-Cu films with CVD/ALD-Co(W) underlayers made using carbonyl precursors (ECS Solid State Letters (2014) 3 (P20))",
author = "Kohei Shima and Hideharu Shimizu and Takeshi Momose and Yukihiro Shimogaki",
year = "2014",
doi = "10.1149/2.0081410ssl",
language = "English",
volume = "3",
pages = "X5",
journal = "ECS Solid State Letters",
issn = "2162-8742",
publisher = "The Electrochemical Society",
number = "10",
}