This report introduces three essential technologies for mechaphotonics; (i) a cantilever resonant microbeam sensor in which laser diodes and a photodiode are monolithically integrated using GaAs micromatching, (ii) rotational manipulation of anisotropically integrated shaped micro-objects by laser radiation pressure, and (iii) photo rechargeable air batteries. All these technologies were created in NTT interdisciplinary research laboratories and they are currently at the stage of principle confirmation and basic design.
|Number of pages||10|
|Journal||NTT R and D|
|Publication status||Published - 1993|
ASJC Scopus subject areas
- Electrical and Electronic Engineering