Essential technologies for mechaphotonics

Hiroo Ukita, Keiji Akuto, Eiji Higurashi

Research output: Contribution to journalArticlepeer-review


This report introduces three essential technologies for mechaphotonics; (i) a cantilever resonant microbeam sensor in which laser diodes and a photodiode are monolithically integrated using GaAs micromatching, (ii) rotational manipulation of anisotropically integrated shaped micro-objects by laser radiation pressure, and (iii) photo rechargeable air batteries. All these technologies were created in NTT interdisciplinary research laboratories and they are currently at the stage of principle confirmation and basic design.

Original languageEnglish
Pages (from-to)1095-1104
Number of pages10
JournalNTT R and D
Issue number9
Publication statusPublished - 1993
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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