EUV laboratory polarimetry and ellipsometry with a laser produced plasma source

Masaki Yamamoto; Minaji Furudate; Ko Mayama; Mihiro Yanagihara; Makoto Watanabe

EUV laboratory polarimetry and ellipsometry with a laser produced plasma source

Masaki Yamamoto, Minaji Furudate, Ko Mayama, Mihiro Yanagihara, Makoto Watanabe

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Conference article › peer-review

Abstract

The ellipsometer system consists of four vacuum chambers accommodating a continuum light source of a laser produced plasma driven by a Q-switched Nd:YAG laser, a concave focusing mirror, a constant-deviation angle monochromator, and a reflectometer chamber in which newly polarizing elements are installed. With the ellipsometer, a multilayer transmission phase shifter was evaluated by transmission ellipsometry. The amplitude transmittance T_p/T_s between p- and s- components were found, where the retardation angle of 80.7° is large enough for various polarimetry measurements. With the multilayer polarizers and the phase shifter, normalized Stokes parameters of the beam from the monochromator was measured, which showed that the beam is mostly unpolarized.

Original language	English
Pages (from-to)	104-105
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	1
Publication status	Published - 1997
Event	Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) - San Francisco, CA, USA Duration: 1997 Nov 10 → 1997 Nov 13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "EUV laboratory polarimetry and ellipsometry with a laser produced plasma source",

abstract = "The ellipsometer system consists of four vacuum chambers accommodating a continuum light source of a laser produced plasma driven by a Q-switched Nd:YAG laser, a concave focusing mirror, a constant-deviation angle monochromator, and a reflectometer chamber in which newly polarizing elements are installed. With the ellipsometer, a multilayer transmission phase shifter was evaluated by transmission ellipsometry. The amplitude transmittance Tp/Ts between p- and s- components were found, where the retardation angle of 80.7° is large enough for various polarimetry measurements. With the multilayer polarizers and the phase shifter, normalized Stokes parameters of the beam from the monochromator was measured, which showed that the beam is mostly unpolarized.",

author = "Masaki Yamamoto and Minaji Furudate and Ko Mayama and Mihiro Yanagihara and Makoto Watanabe",

note = "Copyright: Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.; Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2) ; Conference date: 10-11-1997 Through 13-11-1997",

year = "1997",

language = "English",

volume = "1",

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journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

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T1 - EUV laboratory polarimetry and ellipsometry with a laser produced plasma source

AU - Yamamoto, Masaki

AU - Furudate, Minaji

AU - Mayama, Ko

AU - Yanagihara, Mihiro

AU - Watanabe, Makoto

PY - 1997

Y1 - 1997

N2 - The ellipsometer system consists of four vacuum chambers accommodating a continuum light source of a laser produced plasma driven by a Q-switched Nd:YAG laser, a concave focusing mirror, a constant-deviation angle monochromator, and a reflectometer chamber in which newly polarizing elements are installed. With the ellipsometer, a multilayer transmission phase shifter was evaluated by transmission ellipsometry. The amplitude transmittance Tp/Ts between p- and s- components were found, where the retardation angle of 80.7° is large enough for various polarimetry measurements. With the multilayer polarizers and the phase shifter, normalized Stokes parameters of the beam from the monochromator was measured, which showed that the beam is mostly unpolarized.

AB - The ellipsometer system consists of four vacuum chambers accommodating a continuum light source of a laser produced plasma driven by a Q-switched Nd:YAG laser, a concave focusing mirror, a constant-deviation angle monochromator, and a reflectometer chamber in which newly polarizing elements are installed. With the ellipsometer, a multilayer transmission phase shifter was evaluated by transmission ellipsometry. The amplitude transmittance Tp/Ts between p- and s- components were found, where the retardation angle of 80.7° is large enough for various polarimetry measurements. With the multilayer polarizers and the phase shifter, normalized Stokes parameters of the beam from the monochromator was measured, which showed that the beam is mostly unpolarized.

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M3 - Conference article

AN - SCOPUS:0031381867

SN - 1092-8081

VL - 1

SP - 104

EP - 105

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - Proceedings of the 1997 10th IEEE Lasers and Electro-Optics Society Annual Meeting, LEOS. Part 2 (of 2)

Y2 - 10 November 1997 through 13 November 1997

ER -

EUV laboratory polarimetry and ellipsometry with a laser produced plasma source

Abstract

ASJC Scopus subject areas

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