Evaluation of cooling gas for argon/helium compatible ICP

Hidekazu Miyahara, Takayuki Doi, Youichi Mizusawa, Eiki Hotta, Akitoshi Okino

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


In a new argon/helium compatible ICP torch designed to reduce plasma gas consumption, a cooling gas is exhausted in the same direction as the plasma, which causes concern about an immixture of both gases and air. In this study, the effect of a cooling gas difference and the flow rate on the emission properties of Ar and He ICP were investigated by measuring the emission intensities of OH, N2 and Ar. When an appropriate cooling gas and flow rate were chosen, the background emission caused by the air immixture was reduced.

Original languageEnglish
Pages (from-to)817-825
Number of pages9
JournalBunseki Kagaku
Issue number8
Publication statusPublished - 2004 Aug


  • Ar ICP
  • Gas-cooled ICP
  • He ICP
  • ICP torch


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