Evaluation of elastic inhomogeneity in ZnO crystal by means of the micro-LFB ultrasonic material characterization system

Jun Ichi Kushibiki, Yuji Ohashi, Mototaka Arakawa, Sho Yoshida, Noboru Sakagami

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


In this paper, we tried to evaluate several small ZnO single crystals grown by the hydrothermal method using a micro-line-focus-beam ultrasonic material characterization (LFB-UMC) system. We measured leaky surface-acoustic-wave (LSAW) velocity distributions at 225 MHz for the top and bottom surfaces of three (100) (Y-cut) ZnO specimens with different colors, i.e. different electrical properties. We prepared a standard specimen of YX-ZnO, proper for calibrating the LFB system, which is independent of the piezoelectricity of ZnO. We evaluated the Y-cut specimen surfaces using the piezo-active Z-axis LSAW propagation, resulting in a high velocity of 2649 m/s for a very resistive (> 100 Ωm) surface and a very low velocity of 2618 m/s for a very conductive (< 1 Ωm) surface. Additional experiments for cross-sectional ±c-plane surfaces of one Y-cut ZnO specimen plate revealed significant LSAW velocity distributions associated with the crystal growth condition changes. This ultrasonic method will be useful for further understanding the crystal growth processes.

Original languageEnglish
Title of host publication2009 IEEE International Ultrasonics Symposium and Short Courses, IUS 2009
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Print)9781424443895
Publication statusPublished - 2009
Event2009 IEEE International Ultrasonics Symposium, IUS 2009 - Rome, Italy
Duration: 2009 Sept 202009 Sept 23

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


Conference2009 IEEE International Ultrasonics Symposium, IUS 2009


  • Leaky surface acoustic wave velocity
  • Micro-LFB ultrasonic device
  • Resistivity
  • ZnO single crystal


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