Evaluation of electrical properties in W-DLC coating for strain sensor applications

Takeshi Ohno; Takanori Takeno; Hiroyuki Miki; Tosiyuki Takagi

doi:10.1299/kikaic.76.267

Evaluation of electrical properties in W-DLC coating for strain sensor applications

Takeshi Ohno, Takanori Takeno, Hiroyuki Miki, Tosiyuki Takagi

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.

Original language	English
Pages (from-to)	267-274
Number of pages	8
Journal	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume	76
Issue number	762
DOIs	https://doi.org/10.1299/kikaic.76.267
Publication status	Published - 2010 Feb

Keywords

Coating material
DLC
Sensor
Smart material

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/kikaic.76.267

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abstract = "W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.",

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T1 - Evaluation of electrical properties in W-DLC coating for strain sensor applications

AU - Ohno, Takeshi

AU - Takeno, Takanori

AU - Miki, Hiroyuki

AU - Takagi, Tosiyuki

PY - 2010/2

Y1 - 2010/2

N2 - W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.

AB - W-DLC coatings with various concentrations were prepared by chemical vapour deposition and DC magnetron co-sputtering of a tungsten metal target. Temperature dependence and strain dependence of electrical resistance was measured. Strain was applied to the sample by four-point bending configuration. The electrical resistance increased or decreased as increase or decrease in strain applied and the gauge factor varied according to metal concentration. TCR (temperature coefficient of resistance) varied according to metal concentration. Transmission electron microscope was employed for structure analyses. It was clarified that the structure of W-DLC is granular one. Variation of the resistance under the strain can be explained by the change in distance between the adjacent clusters. W-DLC coating indicated a potential for strain sensor.

KW - Coating material

KW - DLC

KW - Sensor

KW - Smart material

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Evaluation of electrical properties in W-DLC coating for strain sensor applications

Abstract

Keywords

ASJC Scopus subject areas

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