Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

T. Oikawa, C. W. Lee, Y. Kondo, D. Shindo, K. Konno

    Research output: Contribution to journalArticlepeer-review


    Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO2, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.

    Original languageEnglish
    Pages (from-to)434-436
    Number of pages3
    JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
    Issue number5
    Publication statusPublished - 2001


    • Amorphous silicon dioxide
    • Beam broadening
    • Fine electron probe
    • High spatial resolution
    • Magnesium oxide
    • Single crystal silicon
    • Specimen thickness

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Mechanics of Materials
    • Metals and Alloys
    • Materials Chemistry


    Dive into the research topics of 'Evaluation of electron beam broadening due to the specimen in analytical electron microscopy'. Together they form a unique fingerprint.

    Cite this