Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

T. Oikawa; C. W. Lee; Y. Kondo; D. Shindo; K. Konno

doi:10.2320/jinstmet1952.65.5_434

Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

T. Oikawa, C. W. Lee, Y. Kondo, D. Shindo, K. Konno

Research output: Contribution to journal › Article › peer-review

Abstract

Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO₂, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.

Original language	English
Pages (from-to)	434-436
Number of pages	3
Journal	Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume	65
Issue number	5
DOIs	https://doi.org/10.2320/jinstmet1952.65.5_434
Publication status	Published - 2001

Keywords

Amorphous silicon dioxide
Beam broadening
Fine electron probe
High spatial resolution
Magnesium oxide
Single crystal silicon
Specimen thickness

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Metals and Alloys
Materials Chemistry

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10.2320/jinstmet1952.65.5_434

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title = "Evaluation of electron beam broadening due to the specimen in analytical electron microscopy",

abstract = "Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO2, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.",

keywords = "Amorphous silicon dioxide, Beam broadening, Fine electron probe, High spatial resolution, Magnesium oxide, Single crystal silicon, Specimen thickness",

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year = "2001",

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T1 - Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

AU - Oikawa, T.

AU - Lee, C. W.

AU - Kondo, Y.

AU - Shindo, D.

AU - Konno, K.

PY - 2001

Y1 - 2001

N2 - Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO2, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.

AB - Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO2, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.

KW - Amorphous silicon dioxide

KW - Beam broadening

KW - Fine electron probe

KW - High spatial resolution

KW - Magnesium oxide

KW - Single crystal silicon

KW - Specimen thickness

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JF - Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals

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Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

Abstract

Keywords

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