@inproceedings{779e90cff71e49abbcd2da8ad820b85e,
title = "Evaluation of gratings for x-ray and neutron phase imaging techniques by using x-ray projection microscope",
abstract = "In the X-ray and neutron Talbot (-Lau) interferometry, fabrication of phase or amplitude grating with a high-aspect ratio is a key factor to obtain high quality images. To improve the ability of the grating, evaluation of shape and thickness variation and feed-back to the fabrication process are essential. Here, it is shown that X-ray projection microscope with a spatial resolution of sub-micrometer is a powerful tool for the purpose. Three kinds of gratings have been evaluated by using a projection X-ray microscope with X-ray source size of 0.6 micrometer. Uniformity of thickness of the grating has been visualized nondestructively.",
keywords = "Computed tomography, Nondestructive testing, Talbo (-Lau) interferometry, X-ray imaging, X-ray microscopy, X-ray phase contrast imaging",
author = "Katsunori Minami and Wataru Yashiro and Margie Olbinado and Atsushi Momose",
year = "2012",
month = dec,
day = "1",
doi = "10.1063/1.4742291",
language = "English",
isbn = "9780735410725",
series = "AIP Conference Proceedings",
pages = "193--198",
booktitle = "International Workshop on X-Ray and Neutron Phase Imaging with Gratings",
note = "International Workshop on X-Ray and Neutron Phase Imaging with Gratings, XNPIG 2012 ; Conference date: 05-03-2012 Through 07-03-2012",
}