Evaluation of relative vertical error motions of a bench center by using an optical micrometer

Zengyuan Niu, Yuan Liu Chen, Yuki Shimizu, Wei Gao

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

This paper presents a method for the measurement of relative vertical error motions with respect to vertical misalignment error of a bench center by using an optical micrometer. A roll is used as a reference object and the optical micrometer are employed as a measurement device. In order to achieve an accurate evaluation, a measurement method is proposed to remove the straightness error and the concentricity error of the roll. Through experiment, the relative vertical parallelism error motion with respect to the misalignment error was evaluated to be 1.44 um and the vertical straightness error was evaluated to be 14.01 um.

Original languageEnglish
Publication statusPublished - 2017 Nov 13
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
Duration: 2017 Nov 132017 Nov 17

Conference

Conference9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/TerritoryJapan
CityHiroshima City
Period17/11/1317/11/17

Keywords

  • Bench center
  • Error motions
  • Misalignment error
  • Optical micrometer
  • Straightness error of roll

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