Evaluation of residual stress in a transistor using micron scale strain sensors

Engineering

• Residual Stress 100%
• Transistor 76%
• Thin Films 14%
• Processing 14%
• Induced Stress 9%
• Sensor 9%
• Amplitudes 4%
• Local Stress 4%
• Structural Reliability 4%
• Micron 4%
• Sensor Chip 4%
• Semiconductor Material 4%
• Assembly Process 4%
• Residual Stress Distribution 4%
• Intrinsic Stress 4%
• Focused Ion Beam 4%
• Strain Gage 4%
• Surfaces 4%
• Assembly 4%
• Evaluation 4%

Physics

• Strain 28%
• Thin Films 14%
• Amplitudes 4%
• Stress Distribution 4%
• Dielectrics 4%
• Semiconductors (Materials) 4%
• Area 4%
• Evaluation 4%
• Measuring Instruments 4%

Material Science

• Electronics 19%
• Thin Films 14%
• Semiconductor Material 4%
• Dielectric Material 4%
• Surface 4%