Evaluation of soft x-ray multilayer optics using synchrotron radiation

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)524-527
Number of pages4
JournalJournal of the Japan Society for Precision Engineering
Volume80
Issue number6
DOIs
Publication statusPublished - 2014 Jun

Keywords

  • Acceptance
  • Emittance
  • Multilayer
  • Reflectometry
  • Soft X-ray
  • Synchrotron radiation

Cite this