It is said that the metal surface has more catalytic effect as it becomes clean. In this work, we have evaluated the thermal decomposition characteristics of active specialty gases on several metal surfaces in order to find out the best surface for delivering precisely using FT-IR for in-situ measurement in gaseous phase. It was found that the thermal decomposition characteristics of active specialty gas was extremely different due to metal surface. Especially, the PH3 gas decomposed from room temperature on Ni surface. As a result, we confirmed a perfect Cr2O3 passive surface which we had already developed have good properties for active specialty gas distribution system.
|Number of pages
|Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
|Published - 1995
|Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: 1995 Apr 30 → 1995 May 5