Evaluations of optical properties of Co based soft x-ray multilayer gratings

Masahiko Ishino, Masato Koike, Futami Satou, Masami Terauchi, Kazuo Sano, Hiroyuki Sasai

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1 Citation (Scopus)


The multilayer gratings were fabricated by depositing the Co/Si and Co/ SiO2 multilayers onto the surface of laminar-type holographic gratings having shallow grooves. The structures of these multilayer gratings observed by a transmission electron microscope were the well defined structures without serious defects. The structural property evaluated by comparing the measured and calculated diffraction conditions, i.e., incidence and diffraction angles, resulted that the diffraction conditions of multilayer gratings were affected by the refractive indices of multilayer coatings even at the photon energy of 8.05 keV. The measured low diffraction efficiencies of the Co/Si multilayer grating in the photon energy range of 1-2 keV can be attributed to the large interdiffusion in the Co/Si multilayer coating.

Original languageEnglish
Article number073520
JournalJournal of Applied Physics
Issue number7
Publication statusPublished - 2008


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