Evaporation of silver during chemical vapor deposition process for YBa2Cu3O7 and its effect on microstructure

Yanwei Ma; Kazuo Watanabe; Satoshi Awaji; Mitsuhiro Motokawa

doi:10.1143/jjap.40.6339

Evaporation of silver during chemical vapor deposition process for YBa₂Cu₃O₇ and its effect on microstructure

Yanwei Ma, Kazuo Watanabe, Satoshi Awaji, Mitsuhiro Motokawa

IMR - High Field Laboratory for Superconducting Materials

Tohoku University

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

YBa₂Cu₃O₇ (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.

Original language	English
Pages (from-to)	6339-6343
Number of pages	5
Journal	Japanese Journal of Applied Physics
Volume	40
Issue number	11
DOIs	https://doi.org/10.1143/jjap.40.6339
Publication status	Published - 2001 Nov

Keywords

CVD
Evaporation of silver
MgO
Morphology change
Silver substrate
Vapor pressure

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10.1143/jjap.40.6339

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abstract = "YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.",

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T1 - Evaporation of silver during chemical vapor deposition process for YBa2Cu3O7 and its effect on microstructure

AU - Ma, Yanwei

AU - Watanabe, Kazuo

AU - Awaji, Satoshi

AU - Motokawa, Mitsuhiro

PY - 2001/11

Y1 - 2001/11

N2 - YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.

AB - YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.

KW - CVD

KW - Evaporation of silver

KW - MgO

KW - Morphology change

KW - Silver substrate

KW - Vapor pressure

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JO - Japanese Journal of Applied Physics

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Evaporation of silver during chemical vapor deposition process for YBa₂Cu₃O₇ and its effect on microstructure

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Keywords

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