Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

Ting Wei Liu; Yu Ching Lin; Yao Chuan Tsai; Takahito Ono; Shuji Tanaka; Tsung Tsong Wu

doi:10.1063/1.4875981

Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

Ting Wei Liu, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.

Original language	English
Article number	181905
Journal	Applied Physics Letters
Volume	104
Issue number	18
DOIs	https://doi.org/10.1063/1.4875981
Publication status	Published - 2014 May 5

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abstract = "This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.",

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AU - Tanaka, Shuji

AU - Wu, Tsung Tsong

PY - 2014/5/5

Y1 - 2014/5/5

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AB - This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.

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Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

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