Experimental analysis of a DC-RF hybrid plasma flow

Kohtaro Kawajiri; Takehiko Sato; Hideya Nishiyama

doi:10.1016/S0257-8972(03)00256-1

Experimental analysis of a DC-RF hybrid plasma flow

Kohtaro Kawajiri, Takehiko Sato, Hideya Nishiyama

IFS - Nanoscale Flow Research Division

Tohoku University

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

A direct current (DC)-RF hybrid plasma flow has a very complex flow structure because of the interaction between a DC plasma jet and a RF-ICP flow. Therefore, flow control of a DC-RF hybrid plasma flow is very important to enhance its characteristics such as temperature, stability and plasma flame length. In this paper, we clarified the linear interaction between the flow condition and plasma characteristics, and then optimized its operating condition. A DC-RF hybrid plasma flow becomes stable and is elongated with decreasing the central gas ratio. It also becomes stable with increasing the swirl gas. Moreover, a large amount of N₂ gas can be injected with the central gas.

Original language	English
Pages (from-to)	134-139
Number of pages	6
Journal	Surface and Coatings Technology
Volume	171
Issue number	1-3
DOIs	https://doi.org/10.1016/S0257-8972(03)00256-1
Publication status	Published - 2003 Jul 1

Keywords

DC-RF hybrid plasma flow
Flow control
Optimized operating condition

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10.1016/S0257-8972(03)00256-1

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title = "Experimental analysis of a DC-RF hybrid plasma flow",

abstract = "A direct current (DC)-RF hybrid plasma flow has a very complex flow structure because of the interaction between a DC plasma jet and a RF-ICP flow. Therefore, flow control of a DC-RF hybrid plasma flow is very important to enhance its characteristics such as temperature, stability and plasma flame length. In this paper, we clarified the linear interaction between the flow condition and plasma characteristics, and then optimized its operating condition. A DC-RF hybrid plasma flow becomes stable and is elongated with decreasing the central gas ratio. It also becomes stable with increasing the swirl gas. Moreover, a large amount of N2 gas can be injected with the central gas.",

keywords = "DC-RF hybrid plasma flow, Flow control, Optimized operating condition",

author = "Kohtaro Kawajiri and Takehiko Sato and Hideya Nishiyama",

note = "Funding Information: This research project was partially supported by a grant-in-aid for Scientific Research (B) from the Japan Society for Promotion of Science (2001, 2002). We would like to give our sincere thanks to Dr Kandasamy Ramachandran at the Institute of Fluid Science, Tohoku University for his fruitful discussions.",

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AU - Kawajiri, Kohtaro

AU - Sato, Takehiko

AU - Nishiyama, Hideya

N1 - Funding Information: This research project was partially supported by a grant-in-aid for Scientific Research (B) from the Japan Society for Promotion of Science (2001, 2002). We would like to give our sincere thanks to Dr Kandasamy Ramachandran at the Institute of Fluid Science, Tohoku University for his fruitful discussions.

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N2 - A direct current (DC)-RF hybrid plasma flow has a very complex flow structure because of the interaction between a DC plasma jet and a RF-ICP flow. Therefore, flow control of a DC-RF hybrid plasma flow is very important to enhance its characteristics such as temperature, stability and plasma flame length. In this paper, we clarified the linear interaction between the flow condition and plasma characteristics, and then optimized its operating condition. A DC-RF hybrid plasma flow becomes stable and is elongated with decreasing the central gas ratio. It also becomes stable with increasing the swirl gas. Moreover, a large amount of N2 gas can be injected with the central gas.

AB - A direct current (DC)-RF hybrid plasma flow has a very complex flow structure because of the interaction between a DC plasma jet and a RF-ICP flow. Therefore, flow control of a DC-RF hybrid plasma flow is very important to enhance its characteristics such as temperature, stability and plasma flame length. In this paper, we clarified the linear interaction between the flow condition and plasma characteristics, and then optimized its operating condition. A DC-RF hybrid plasma flow becomes stable and is elongated with decreasing the central gas ratio. It also becomes stable with increasing the swirl gas. Moreover, a large amount of N2 gas can be injected with the central gas.

KW - DC-RF hybrid plasma flow

KW - Flow control

KW - Optimized operating condition

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Experimental analysis of a DC-RF hybrid plasma flow

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Keywords

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