Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe xSi 1-x) 13H y

T. Tsukamoto; Masayoshi Esashi; S. Tanaka

doi:10.1109/MEMSYS.2012.6170410

Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe _xSi _1-x) ₁₃H _y

T. Tsukamoto, Masayoshi Esashi, S. Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrated microscale cooling by a solid state micro magnetic refrigerator (SSMMR). The SSMMR consists of thermally isolated magnetic material (La(Fe _xSi _1-x) ₁₃H _y), two thermal switches and a magnetic field switch. Thermal isolation structure and thermal switch were fabricated using MEMS fabrication process. The magnetic field switch were designed and fabricated to change the magnetic flux density between 0 T and 1 T. Under this magnitude of magnetic field modulation, the La(Fe _xSi _1-x) ₁₃H _y showed a temperature change of ca. 1°C. By the refrigeration cycle, about 0.6°C cooling effect was observed on the thermally isolated cold plate. From these results, the estimated cooling power of the SSMMR was ca. 9 μW.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1225-1228
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170410
Publication status	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2012.6170410

Cite this

Tsukamoto, T., Esashi, M., & Tanaka, S. (2012). Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe _xSi _1-x) ₁₃H _y In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1225-1228). [6170410] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170410

Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe _xSi _1-x) ₁₃H _y . / Tsukamoto, T.; Esashi, Masayoshi; Tanaka, S.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1225-1228 6170410 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsukamoto, T, Esashi, M & Tanaka, S 2012, Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe _xSi _1-x) ₁₃H _y in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170410, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1225-1228, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170410

Tsukamoto T, Esashi M, Tanaka S. Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(Fe _xSi _1-x) ₁₃H _y In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1225-1228. 6170410. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170410

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abstract = "We demonstrated microscale cooling by a solid state micro magnetic refrigerator (SSMMR). The SSMMR consists of thermally isolated magnetic material (La(Fe xSi 1-x) 13H y), two thermal switches and a magnetic field switch. Thermal isolation structure and thermal switch were fabricated using MEMS fabrication process. The magnetic field switch were designed and fabricated to change the magnetic flux density between 0 T and 1 T. Under this magnitude of magnetic field modulation, the La(Fe xSi 1-x) 13H y showed a temperature change of ca. 1°C. By the refrigeration cycle, about 0.6°C cooling effect was observed on the thermally isolated cold plate. From these results, the estimated cooling power of the SSMMR was ca. 9 μW.",

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