Explication for femtosecond-laser-induced nanostrucuring on glass surface

Akihiro Shibata, Shuhei Kodama, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review


Generally surfaces with nano meter-si zed structures provide various functions to materials. For example, a glass surface with nanostructures reduces the surface reflectance of optical elements such as camera lenses. While this kind of dogma-researches about surface functions are matured, researches on processing methods for general industrial production are still few. As one of cost-effective nano fabrication methods, we had reported the phenomenon that coating process of the light-absorbable glass precursor and irradiation process of femtosecond-laser on the surface could fabricate nanostructures on a glass surface. In this paper, for the sake of clarifying the fabrication process, cross-sectional analyses of the fabricated inicrostructures were conducted. Cross-sectional analyses were conducted step-by-step on irradiation number of the glass precursor and they revealed that the structuring process is consisted of the 3 Steps. At first, laser irradiation induces oxidization and shrinking in glass precursor layer. Secondly periodic cracks generate inside glass precursor layer. Finally grown-up cracks peel off the layer over the crack and periodic structure are revealed on left surface. These 3 steps are significantly singular processes in conventional researches about laser-induced periodic surface structuring.

Original languageEnglish
Pages (from-to)443-447
Number of pages5
JournalJournal of the Japan Society for Precision Engineering
Issue number5
Publication statusPublished - 2016


  • Femtosecond-laser
  • Functional interface
  • Glass
  • Nano-steed texturing
  • Poly-silazane
  • Surface plasmon


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