Abstract
Diamond turning tests have been made on single crystalline silicon wafers. It was found that chips removed from the material surface during machining consist of nano needles, nano ribbons and nano fibers, the shape and size of which depend on the undeformed chip thickness and the cutting edge geometry. Electron diffraction studies showed that the needle-type chips are micro-crystalline with slight amorphization; while the nano ribbons and nano fibers have been mostly transformed into the amorphous phase. This work preliminary demonstrated the feasibility of an efficient and inexpensive production method for mechanically flexible nano ribbons and nano fibers for micronano mechanical and electronic applications.
Original language | English |
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Pages (from-to) | 1423-1427 |
Number of pages | 5 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 9 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2009 Feb 1 |
Keywords
- Amorphous
- Chip formation
- Diamond turning
- Ductile machining
- Nano fibber
- Nano ribbon
- Phase transformation.
- Semiconductor
- Silicon
ASJC Scopus subject areas
- Bioengineering
- Chemistry(all)
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics