Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno; Kay Nottmeyer; Cleopatra Cabuz; Takashi Kobayashi; Masayoshi Esashi

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Takashi Kobayashi, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to conference › Paper › peer-review

4 Citations (Scopus)

Abstract

A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

Original language	English
Pages	679-682
Number of pages	4
Publication status	Published - 1995
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	95/6/25 → 95/6/29

ASJC Scopus subject areas

Engineering(all)

Cite this

Mizuno, J., Nottmeyer, K., Cabuz, C., Kobayashi, T., & Esashi, M. (1995). Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. 679-682. Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. / Mizuno, Jun; Nottmeyer, Kay; Cabuz, Cleopatra et al.
1995. 679-682 Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

Research output: Contribution to conference › Paper › peer-review

Mizuno, J, Nottmeyer, K, Cabuz, C, Kobayashi, T & Esashi, M 1995, 'Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate', Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, 95/6/25 - 95/6/29 pp. 679-682.

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abstract = "A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.",

author = "Jun Mizuno and Kay Nottmeyer and Cleopatra Cabuz and Takashi Kobayashi and Masayoshi Esashi",

year = "1995",

language = "English",

pages = "679--682",

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AU - Mizuno, Jun

AU - Nottmeyer, Kay

AU - Cabuz, Cleopatra

AU - Kobayashi, Takashi

AU - Esashi, Masayoshi

PY - 1995

Y1 - 1995

N2 - A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

AB - A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

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T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

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ASJC Scopus subject areas

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