TY - GEN
T1 - Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid
AU - Indianto, Mohammad Akita
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Funding Information:
This work was supported by JSPS KAKENHI Grant Numbers JP26706023 and JP15KK0225. Part of this work was performed at the Micro/Nanomachining Research and Education Center (MNC) and Micro System Integration Center (ȝSIC) of Tohoku University. One of the authors (M. A. I.) was financially supported by Indonesia Endowment Fund for Education (LPDP) during the study in Tohoku University, Japan.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. Flowing liquid is injected as the evaluation of mass change detection performance of the device. The evaluated result shows consistent value with the actual mass. Self-oscillation experiment has been used for recording actual mass change based on the resonance frequency shift with flowing liquid using digital data logger. Minimum mass resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.
AB - In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. Flowing liquid is injected as the evaluation of mass change detection performance of the device. The evaluated result shows consistent value with the actual mass. Self-oscillation experiment has been used for recording actual mass change based on the resonance frequency shift with flowing liquid using digital data logger. Minimum mass resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.
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U2 - 10.1109/MEMSYS.2018.8346793
DO - 10.1109/MEMSYS.2018.8346793
M3 - Conference contribution
AN - SCOPUS:85047012192
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1261
EP - 1264
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -