Abstract
A three-dimensional optically coupled common memory (3D-OCC memory) test chip, on which GaAs LEDs are integrated using the microbonding technique, has been fabricated using a 2 μm complementary metal-oxide-semiconductor (CMOS) technology. Static memory cell circuits with photodiodes were formed on the chip. Optical writing and electrical reading operations of the 3D-OCC memory test chip have been demonstrated.
Original language | English |
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Pages (from-to) | 1246-1248 |
Number of pages | 3 |
Journal | Japanese journal of applied physics |
Volume | 34 |
Issue number | 2S |
DOIs | |
Publication status | Published - 1995 Feb |
Externally published | Yes |
Keywords
- Common memory
- LED
- Microbond ing
- Optical coupling
- Optical writing
- Parallel processing
- Photodiode
- Three-dimensional 1C
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)