Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films

With the aim of investigating nano-imprintability of glassy alloys in a film form, Zr₄₉Al₁₁Ni₈Cu₃₂, Pd ₃₉Cu₂₉Ni₁₃P₁₉ and Cu ₃₈Zr₄₇Al₉Ag₆ glassy alloy thin films were fabricated on Si substrate by a magnetron sputtering method. These films exhibit a very smooth surface, a distinct glass transition phenomenon and a large supercooled liquid region of about 80 K, which are suitable for imprinting materials. Moreover, thermal nano-imprintability of these obtained films is demonstrated by using a dot array mold with a dot diameter of 90 nm. Surface observations revealed that periodic nano-hole arrays with a hole diameter of 90 nm were successfully imprinted on the surface of these films. Among them, Pd-based glassy alloy thin film indicated more precise pattern imprintability, namely, flatter residual surface plane and sharper hole edge. It is said that these glassy alloy thin films, especially Pd-based glassy alloy thin film, are one of the promising materials for fabricating micro-machines and nano-devices by thermal imprinting.