Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films

Kana Takenaka, Noriko Saidoh, Nobuyuki Nishiyama, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


With the aim of investigating nano-imprintability of glassy alloys in a film form, Zr49Al11Ni8Cu32, Pd 39Cu29Ni13P19 and Cu 38Zr47Al9Ag6 glassy alloy thin films were fabricated on Si substrate by a magnetron sputtering method. These films exhibit a very smooth surface, a distinct glass transition phenomenon and a large supercooled liquid region of about 80 K, which are suitable for imprinting materials. Moreover, thermal nano-imprintability of these obtained films is demonstrated by using a dot array mold with a dot diameter of 90 nm. Surface observations revealed that periodic nano-hole arrays with a hole diameter of 90 nm were successfully imprinted on the surface of these films. Among them, Pd-based glassy alloy thin film indicated more precise pattern imprintability, namely, flatter residual surface plane and sharper hole edge. It is said that these glassy alloy thin films, especially Pd-based glassy alloy thin film, are one of the promising materials for fabricating micro-machines and nano-devices by thermal imprinting.

Original languageEnglish
Article number105302
Issue number10
Publication statusPublished - 2011 Mar 11

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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