Fabrication of 3D microstructures using micro stereolithography (1st report) -A proposal of a new type micro stereolithography and sitnulation of curing shape of resins-

This paper describes that a new type unconstrained surface method for micro stereolithography which can harden ultraviolet solidified resins selectivity by gathering ultraviolet rays under the surface of resins is proposed. The stereolithography method is roughly classified in two methods; one is a constrained surface method, the other is an unconstrained surface method. The constrained surface method has been used to fabricate microstructures using stereolithography because it is easy to obtain high accuracy microstructures than the unconstrained surface method. The proposed method has advantages of decreasing in a harmful influence of the fabrication accuracy for generated unsolidified layer for oxygen and for surface tension. The analyses of the shape of hardened resin are calculated the light energy distribution considering to an aberration of an object lens. The resin was hardened selectivity under the surface of the resin that is recognized. The results of the shape of cuting resin which are compared with simulation analyses and cuting experiments are in approximately agreement with the height of experimental structures.