Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

Kazuki Mano; Ryo Aihara; Yuki Shimizu; Yuanliu Chen; Wei Gao

Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuanliu Chen, Wei Gao

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.

Original language	English
Publication status	Published - 2017 Nov 13
Event	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17

Other

Other	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/Territory	Japan
City	Hiroshima City
Period	17/11/13 → 17/11/17

Keywords

Advanced manufacturing technology
Diffraction grating
Laser interference lithography
Lloyd's mirror interferometer

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

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title = "Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer",

abstract = "This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.",

keywords = "Advanced manufacturing technology, Diffraction grating, Laser interference lithography, Lloyd's mirror interferometer",

author = "Kazuki Mano and Ryo Aihara and Yuki Shimizu and Yuanliu Chen and Wei Gao",

note = "Funding Information: This work was supported by the Japan Society for the Promotion of Science (JSPS).; 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ; Conference date: 13-11-2017 Through 17-11-2017",

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language = "English",

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TY - CONF

T1 - Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

AU - Mano, Kazuki

AU - Aihara, Ryo

AU - Shimizu, Yuki

AU - Chen, Yuanliu

AU - Gao, Wei

N1 - Funding Information: This work was supported by the Japan Society for the Promotion of Science (JSPS).

PY - 2017/11/13

Y1 - 2017/11/13

N2 - This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.

AB - This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.

KW - Advanced manufacturing technology

KW - Diffraction grating

KW - Laser interference lithography

KW - Lloyd's mirror interferometer

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UR - http://www.scopus.com/inward/citedby.url?scp=85041319912&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:85041319912

T2 - 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017

Y2 - 13 November 2017 through 17 November 2017

ER -

Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

Abstract

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Keywords

ASJC Scopus subject areas

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