Fabrication of AI microspheres by utilizing electromigration

Yuxin Sun, Hironori Tohmyoh, Masumi Saka

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.

Original languageEnglish
Pages (from-to)1972-1975
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Issue number3
Publication statusPublished - 2009 Mar


  • Aluminum
  • Electromigration
  • Microsphere
  • Passivation layer
  • Surface tension


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