Fabrication of analog- and digital-modulated pitch-variable gratings using silicon-on-insulator substrates

Yoshiaki Kanamori, Takashi Kobayashi, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review


We fabricated pitch-variable gratings using silicon microactuators, which are highly compatible with micro-electro-mechanical systems technologies. To obtain a large change in diffraction angle with a small driving force, the grating period was designed to be as small as 4 μm. Two types of pitch-variable grating, namely, thermal-driven analog-modulated grating and electrostatic-driven digital-modulated grating, were newly designed and fabricated. Silicon-on-insulator substrates were used for the fabrication. Both gratings were fabricated with high accuracy. The changes in diffraction angles agreed well with the calculated values.

Original languageEnglish
Pages (from-to)5274-5277
Number of pages4
JournalJapanese journal of applied physics
Issue number6 PART 2
Publication statusPublished - 2008 Jun 20


  • Diffraction gratings
  • Micro-electro-mechanical systerm
  • Micromachining
  • Periodic structures
  • Pitch-variable gratings
  • Silicon-on-insulator

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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