Multiwall carbon nanotubes (CNTs) with Au/Ti electrodes were fabricated using electron-beam lithography, lift-off technique and successive electroplating with in situ conductance observation. Two-terminal resistance became dramatically small after the electroplating. This should be due to the small contact resistance between the CNT and the plated metal. The two-terminal resistance after the plating ranged from ≃10 kΩ to some 100 kΩ. At low temperature, low-resistance samples after the plating showed very good ohmic characteristics while high-resistance samples showed Coulomb blockade. A possibility of an in situ length dependence measurement of CNT conductance was demonstrated.
- Carbon nanotube
- Contact resistance