TY - GEN
T1 - Fabrication of high accuracy micro-translation-table for near-field optical data storage actuated by inverted-scratch-drive-actuators
AU - Kanamori, Y.
AU - Yahagi, H.
AU - Ono, T.
AU - Sasaki, M.
AU - Hane, K.
N1 - Publisher Copyright:
© 2002 IEEE.
PY - 2002
Y1 - 2002
N2 - In recent years, development of a next generation high-density recording system has attracted an increasing attention with the improvement of the storage density. One of the attractive technologies to overcome the limit of the storage density is near-field optical data storage. The optical memory with high density and high data transfer rate is highly demanded to utilize an array of nano-scaled light sources for writing and reading bits formed on a recording medium. We have fabricated a micro-translation-table to convey the recording medium to the near-field optical head. The proposed micro-translation-table consists of the inverted scratch drive-actuators (SDAs) which are electrostatically driven. The inverted SDA is powerful and precise due to the stepwise movement. A long distance translation is achieved by repeating the stepwise movement. Fast moving speed, high response and the positioning resolution of the order of 1 nanometer are possible. The inverted SDA has been fabricated with silicon surface micromachining technology. We have proposed a novel mechanism that the SDAs can be retracted to a substrate by applying the voltage between the SDA and a lower electrode. Therefore, the SDAs used for the conveyance are stretched and others are retracted. We have observed that a micro object is translated with the fabricated actuators by applying AC voltage of 600 V at 100 Hz.
AB - In recent years, development of a next generation high-density recording system has attracted an increasing attention with the improvement of the storage density. One of the attractive technologies to overcome the limit of the storage density is near-field optical data storage. The optical memory with high density and high data transfer rate is highly demanded to utilize an array of nano-scaled light sources for writing and reading bits formed on a recording medium. We have fabricated a micro-translation-table to convey the recording medium to the near-field optical head. The proposed micro-translation-table consists of the inverted scratch drive-actuators (SDAs) which are electrostatically driven. The inverted SDA is powerful and precise due to the stepwise movement. A long distance translation is achieved by repeating the stepwise movement. Fast moving speed, high response and the positioning resolution of the order of 1 nanometer are possible. The inverted SDA has been fabricated with silicon surface micromachining technology. We have proposed a novel mechanism that the SDAs can be retracted to a substrate by applying the voltage between the SDA and a lower electrode. Therefore, the SDAs used for the conveyance are stretched and others are retracted. We have observed that a micro object is translated with the fabricated actuators by applying AC voltage of 600 V at 100 Hz.
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U2 - 10.1109/IMNC.2002.1178665
DO - 10.1109/IMNC.2002.1178665
M3 - Conference contribution
AN - SCOPUS:65549157759
T3 - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002
SP - 306
EP - 307
BT - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Microprocesses and Nanotechnology Conference, MNC 2002
Y2 - 6 November 2002 through 8 November 2002
ER -