Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD

Van Toan Nguyen; Takahito Ono

doi:10.1109/MEMSYS.2017.7863492

Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD

Van Toan Nguyen, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This work reports the patterning of high aspect aluminum doped zinc oxide (AZO) for nanowall hollows and capacitive resonators by deep reactive ion etching (deep RIE) and atomic layer deposition (ALD). Nanowall hollows with 50 nm in thickness and 15 μm in height as well as smooth surfaces have been achieved and the aspect ratio of their height-to-width is as high as 300. Suspended AZO capacitive resonators have been successfully fabricated. Its resonant frequency is observed at 10.4 kHz and the quality factor (Q) is approximately 500.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	652-655
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863492
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2017.7863492

Cite this

Nguyen, V. T., & Ono, T. (2017). Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 652-655). [7863492] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863492

Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD. / Nguyen, Van Toan ; Ono, Takahito.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 652-655 7863492 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nguyen, VT & Ono, T 2017, Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863492, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 652-655, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863492

Nguyen VT , Ono T. Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 652-655. 7863492. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863492

Nguyen, Van Toan ; Ono, Takahito. / Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 652-655 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD",

abstract = "This work reports the patterning of high aspect aluminum doped zinc oxide (AZO) for nanowall hollows and capacitive resonators by deep reactive ion etching (deep RIE) and atomic layer deposition (ALD). Nanowall hollows with 50 nm in thickness and 15 μm in height as well as smooth surfaces have been achieved and the aspect ratio of their height-to-width is as high as 300. Suspended AZO capacitive resonators have been successfully fabricated. Its resonant frequency is observed at 10.4 kHz and the quality factor (Q) is approximately 500.",

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N2 - This work reports the patterning of high aspect aluminum doped zinc oxide (AZO) for nanowall hollows and capacitive resonators by deep reactive ion etching (deep RIE) and atomic layer deposition (ALD). Nanowall hollows with 50 nm in thickness and 15 μm in height as well as smooth surfaces have been achieved and the aspect ratio of their height-to-width is as high as 300. Suspended AZO capacitive resonators have been successfully fabricated. Its resonant frequency is observed at 10.4 kHz and the quality factor (Q) is approximately 500.

AB - This work reports the patterning of high aspect aluminum doped zinc oxide (AZO) for nanowall hollows and capacitive resonators by deep reactive ion etching (deep RIE) and atomic layer deposition (ALD). Nanowall hollows with 50 nm in thickness and 15 μm in height as well as smooth surfaces have been achieved and the aspect ratio of their height-to-width is as high as 300. Suspended AZO capacitive resonators have been successfully fabricated. Its resonant frequency is observed at 10.4 kHz and the quality factor (Q) is approximately 500.

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BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

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Fabrication of high aspect aluminum doped zinc oxide nanomechanical structures by deep RIE and ALD

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