Fabrication of integrated magnetic tunnel junctions for detection of bio-magnetic field

Kosuke Fujiwara, Mikihiko Oogane, Daiki Kato, Takuo Nishikawa, Hiroshi Naganuma, Yasuo Ando

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Since MTJ sensor is an element of room temperature operation, low power consumption, low cost and small device size, thus it is expectable to spread widely the medical diagnostics and basic research using bio-magnetic fields. In this study, in order to reduce 1/f noise, 100×100 MTJ sensor arrays were fabricated. Figure shows the system of imperceptible magnetic filed detection. The magnetic field was generated with the one turn coil, using the sine wave of 123 Hz. The result is shown in figure. In this study, the detection of a magnetic field of 0.29 nT was demonstrated with fabricated 100×100 MTJ sensor array.

Original languageEnglish
Pages (from-to)0-505-0-506
JournalTransactions of Japanese Society for Medical and Biological Engineering
Publication statusPublished - 2014 Aug 17


  • Bio-magnetic field
  • Magnetic tunnel junction
  • Tunnel magneto-resistance


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