TY - JOUR
T1 - Fabrication of magnetic tunnel junctions with amorphous CoFeSiB for the bio-magnetic field sensor devices
AU - Kato, Daiki
AU - Oogane, Mikihiko
AU - Fujiwara, Kosuke
AU - Nishikawa, Takuo
AU - Naganuma, Hiroshi
AU - Ando, Yasuo
N1 - Publisher Copyright:
© 2014, Japan Soc. of Med. Electronics and Biol. Engineering. All rights reserved.
PY - 2014/8/17
Y1 - 2014/8/17
N2 - In magnetic tunnel junctions (MTJs), the resistance changes by external magnetic field through tunnel magnetoresistance (TMR) effect and MTJs can be applied to magnetic field sensors. To detect a small bio-magnetic field, we have to develop MTJs with high sensitivity (=TMR/2Hk, Hk: magnetic anisotropy field) of more than 100%/Oe, which is two digit larger than that of actual devices. In this work, MTJs with a low Hk CoFeSiB amorphous electrode was fabricated to realize such a highly sensitive magnetic sensor. After optimizing the preparation condition of CoFeSiB, a very high sensitivity of 40%/Oe was obtained. The result came much closer to our goal.
AB - In magnetic tunnel junctions (MTJs), the resistance changes by external magnetic field through tunnel magnetoresistance (TMR) effect and MTJs can be applied to magnetic field sensors. To detect a small bio-magnetic field, we have to develop MTJs with high sensitivity (=TMR/2Hk, Hk: magnetic anisotropy field) of more than 100%/Oe, which is two digit larger than that of actual devices. In this work, MTJs with a low Hk CoFeSiB amorphous electrode was fabricated to realize such a highly sensitive magnetic sensor. After optimizing the preparation condition of CoFeSiB, a very high sensitivity of 40%/Oe was obtained. The result came much closer to our goal.
KW - Bio-magnetic field
KW - Magnetic field sensor
KW - Magnetic tunnel junction
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U2 - 10.11239/jsmbe.52.O-504
DO - 10.11239/jsmbe.52.O-504
M3 - Article
AN - SCOPUS:84939426361
SN - 1881-4379
VL - 52
SP - O-504
JO - Transactions of Japanese Society for Medical and Biological Engineering
JF - Transactions of Japanese Society for Medical and Biological Engineering
ER -