Fabrication of MgO-based magnetic tunnel junctions with CoCrPt perpendicularly magnetized electrodes

Daisuke Watanabe; Shigemi Mizukami; Mikihiko Oogane; Hiroshi Naganuma; Yasuo Ando; Terunobu Miyazaki

doi:10.1063/1.3062816

Fabrication of MgO-based magnetic tunnel junctions with CoCrPt perpendicularly magnetized electrodes

Daisuke Watanabe, Shigemi Mizukami, Mikihiko Oogane, Hiroshi Naganuma, Yasuo Ando, Terunobu Miyazaki

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The applicability of perpendicularly magnetized CoCrPt films to the MgO-based magnetic tunnel junctions (MTJs) was investigated. For this study, CoCrPt films deposited on the Ru buffer exhibited hcp(0002)-oriented growth by sputtering method using the low substrate temperature of 250 °C, low saturation magnetization of around 360 emu/ cm3, and high magnetic anisotropy field of 6 kOe, which is sufficient to retain the thermal stability of the magnetization direction. The MgO-based MTJs with a synthetic ferrimagnetlike structure were fabricated: CoFe was coupled magnetically with CoCrPt through the thin Ru layer. Transport properties with a magnetic field applied perpendicular to the film plane revealed a tunnel magnetoresistance ratio of about 6% at room temperature.

Original language	English
Article number	07C911
Journal	Journal of Applied Physics
Volume	105
Issue number	7
DOIs	https://doi.org/10.1063/1.3062816
Publication status	Published - 2009

ASJC Scopus subject areas

Physics and Astronomy(all)

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abstract = "The applicability of perpendicularly magnetized CoCrPt films to the MgO-based magnetic tunnel junctions (MTJs) was investigated. For this study, CoCrPt films deposited on the Ru buffer exhibited hcp(0002)-oriented growth by sputtering method using the low substrate temperature of 250 °C, low saturation magnetization of around 360 emu/ cm3, and high magnetic anisotropy field of 6 kOe, which is sufficient to retain the thermal stability of the magnetization direction. The MgO-based MTJs with a synthetic ferrimagnetlike structure were fabricated: CoFe was coupled magnetically with CoCrPt through the thin Ru layer. Transport properties with a magnetic field applied perpendicular to the film plane revealed a tunnel magnetoresistance ratio of about 6% at room temperature.",

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AU - Watanabe, Daisuke

AU - Mizukami, Shigemi

AU - Oogane, Mikihiko

AU - Naganuma, Hiroshi

AU - Ando, Yasuo

AU - Miyazaki, Terunobu

PY - 2009

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N2 - The applicability of perpendicularly magnetized CoCrPt films to the MgO-based magnetic tunnel junctions (MTJs) was investigated. For this study, CoCrPt films deposited on the Ru buffer exhibited hcp(0002)-oriented growth by sputtering method using the low substrate temperature of 250 °C, low saturation magnetization of around 360 emu/ cm3, and high magnetic anisotropy field of 6 kOe, which is sufficient to retain the thermal stability of the magnetization direction. The MgO-based MTJs with a synthetic ferrimagnetlike structure were fabricated: CoFe was coupled magnetically with CoCrPt through the thin Ru layer. Transport properties with a magnetic field applied perpendicular to the film plane revealed a tunnel magnetoresistance ratio of about 6% at room temperature.

AB - The applicability of perpendicularly magnetized CoCrPt films to the MgO-based magnetic tunnel junctions (MTJs) was investigated. For this study, CoCrPt films deposited on the Ru buffer exhibited hcp(0002)-oriented growth by sputtering method using the low substrate temperature of 250 °C, low saturation magnetization of around 360 emu/ cm3, and high magnetic anisotropy field of 6 kOe, which is sufficient to retain the thermal stability of the magnetization direction. The MgO-based MTJs with a synthetic ferrimagnetlike structure were fabricated: CoFe was coupled magnetically with CoCrPt through the thin Ru layer. Transport properties with a magnetic field applied perpendicular to the film plane revealed a tunnel magnetoresistance ratio of about 6% at room temperature.

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Fabrication of MgO-based magnetic tunnel junctions with CoCrPt perpendicularly magnetized electrodes

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