Fabrication of micro-tips by lift off process with contact shadow masking

Honam Kwon; Akio Higo; Hiroshi Toshiyoshi

doi:10.1109/NEMS.2007.352064

Fabrication of micro-tips by lift off process with contact shadow masking

Honam Kwon, Akio Higo, Hiroshi Toshiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 um with electrical current of 90 mA.

Original language	English
Title of host publication	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages	488-492
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2007.352064
Publication status	Published - 2007
Event	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand Duration: 2007 Jan 16 → 2007 Jan 19

Publication series

Name	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Country/Territory	Thailand
City	Bangkok
Period	07/1/16 → 07/1/19

Keywords

Contact shadow mask
Data storage
Evaporation
Lift off
Tip

ASJC Scopus subject areas

Computer Networks and Communications
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2007.352064

Cite this

Kwon, H., Higo, A., & Toshiyoshi, H. (2007). Fabrication of micro-tips by lift off process with contact shadow masking. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 488-492). [4160367] (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352064

Fabrication of micro-tips by lift off process with contact shadow masking. / Kwon, Honam; Higo, Akio; Toshiyoshi, Hiroshi.

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 488-492 4160367 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kwon, H, Higo, A & Toshiyoshi, H 2007, Fabrication of micro-tips by lift off process with contact shadow masking. in Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160367, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp. 488-492, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 07/1/16. https://doi.org/10.1109/NEMS.2007.352064

Kwon H, Higo A, Toshiyoshi H. Fabrication of micro-tips by lift off process with contact shadow masking. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 488-492. 4160367. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). doi: 10.1109/NEMS.2007.352064

Kwon, Honam ; Higo, Akio ; Toshiyoshi, Hiroshi. / Fabrication of micro-tips by lift off process with contact shadow masking. Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. pp. 488-492 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

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title = "Fabrication of micro-tips by lift off process with contact shadow masking",

abstract = "We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 um with electrical current of 90 mA.",

keywords = "Contact shadow mask, Data storage, Evaporation, Lift off, Tip",

author = "Honam Kwon and Akio Higo and Hiroshi Toshiyoshi",

note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",

year = "2007",

doi = "10.1109/NEMS.2007.352064",

language = "English",

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AU - Higo, Akio

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N2 - We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 um with electrical current of 90 mA.

AB - We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 um with electrical current of 90 mA.

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KW - Data storage

KW - Evaporation

KW - Lift off

KW - Tip

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Fabrication of micro-tips by lift off process with contact shadow masking

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Keywords

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