Fabrication of multilayered film of polyimide nanoparticles for low-k applications

Gufan Zhao; Takayuki Ishizaka; Hitoshi Kasai; Hidetoshi Oikawa; Hachiro Nakanishi

Fabrication of multilayered film of polyimide nanoparticles for low-k applications

Gufan Zhao, Takayuki Ishizaka, Hitoshi Kasai, Hidetoshi Oikawa, Hachiro Nakanishi

IMRAM - Materials-Measurement Hybrid Research Center

Tohoku University

Research output: Contribution to conference › Paper › peer-review

Abstract

In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.

Original language	English
Pages	3815-3816
Number of pages	2
Publication status	Published - 2006
Event	55th Society of Polymer Science Japan Symposium on Macromolecules - Toyama, Japan Duration: 2006 Sept 20 → 2006 Sept 22

Conference

Conference	55th Society of Polymer Science Japan Symposium on Macromolecules
Country/Territory	Japan
City	Toyama
Period	06/9/20 → 06/9/22

Keywords

Electrodeposition
Low-k
Multilayered film
Polyimide
Porous nanoparticle
Reprecipitation

Cite this

@conference{a5e9ee5918e24243bc6d4357d9f5c02f,

title = "Fabrication of multilayered film of polyimide nanoparticles for low-k applications",

abstract = "In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.",

keywords = "Electrodeposition, Low-k, Multilayered film, Polyimide, Porous nanoparticle, Reprecipitation",

author = "Gufan Zhao and Takayuki Ishizaka and Hitoshi Kasai and Hidetoshi Oikawa and Hachiro Nakanishi",

year = "2006",

language = "English",

pages = "3815--3816",

note = "55th Society of Polymer Science Japan Symposium on Macromolecules ; Conference date: 20-09-2006 Through 22-09-2006",

}

TY - CONF

T1 - Fabrication of multilayered film of polyimide nanoparticles for low-k applications

AU - Zhao, Gufan

AU - Ishizaka, Takayuki

AU - Kasai, Hitoshi

AU - Oikawa, Hidetoshi

AU - Nakanishi, Hachiro

PY - 2006

Y1 - 2006

N2 - In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.

AB - In order to reduce dielectric constant of polyimide, preparation of porous films assembled by polyimide nanoparticles was investigated. We utilized the electrodeposition of polyimide nanoparticles to prepare porous low-k films possessing voids between particles. The film morphology can be controlled by changing electrical potential and dispersion concentration of polyimide nanoparticles. Dielectric properties of porous films obtained will be discussed. Moreover, fabrication of porous polyimide nanoparticles was also studied.

KW - Electrodeposition

KW - Low-k

KW - Multilayered film

KW - Polyimide

KW - Porous nanoparticle

KW - Reprecipitation

UR - http://www.scopus.com/inward/record.url?scp=33846182961&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33846182961&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:33846182961

SP - 3815

EP - 3816

T2 - 55th Society of Polymer Science Japan Symposium on Macromolecules

Y2 - 20 September 2006 through 22 September 2006

ER -

Fabrication of multilayered film of polyimide nanoparticles for low-k applications

Abstract

Conference

Keywords

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