Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing

Jeongdai Jo; Taik Min Lee; Chung Hwan Kim; Kwang Young Kim; Eung Sug Lee; Masayoshi Esashi

doi:10.4028/0-87849-463-4.661

Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing

Jeongdai Jo, Taik Min Lee, Chung Hwan Kim, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi

Research output: Contribution to journal › Conference article › peer-review

Abstract

The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h- PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000A&̊) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.

Original language	English
Pages (from-to)	661-664
Number of pages	4
Journal	Advanced Materials Research
Volume	24-25
DOIs	https://doi.org/10.4028/0-87849-463-4.661
Publication status	Published - 2007
Externally published	Yes
Event	PRICM 6: The 6th Pacific Rim International Conference on Advanced Materials and Processing - Jeju Island, Korea, Republic of Duration: 2007 Nov 5 → 2007 Nov 9

Keywords

Flexible display
Microcontact printing
OTFT
PDMS stamp
Printed electronics
SAM

ASJC Scopus subject areas

Engineering(all)

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10.4028/0-87849-463-4.661

Cite this

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title = "Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing",

abstract = "The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h- PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300{\AA}, 5000{\AA}, 6500{\AA}, 7500{\AA}, and 9000A&̊) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.",

keywords = "Flexible display, Microcontact printing, OTFT, PDMS stamp, Printed electronics, SAM",

author = "Jeongdai Jo and Lee, {Taik Min} and Kim, {Chung Hwan} and Kim, {Kwang Young} and Lee, {Eung Sug} and Masayoshi Esashi",

year = "2007",

doi = "10.4028/0-87849-463-4.661",

language = "English",

volume = "24-25",

pages = "661--664",

journal = "Advanced Materials Research",

issn = "1022-6680",

publisher = "Trans Tech Publications",

note = "PRICM 6: The 6th Pacific Rim International Conference on Advanced Materials and Processing ; Conference date: 05-11-2007 Through 09-11-2007",

}

TY - JOUR

T1 - Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing

AU - Jo, Jeongdai

AU - Lee, Taik Min

AU - Kim, Chung Hwan

AU - Kim, Kwang Young

AU - Lee, Eung Sug

AU - Esashi, Masayoshi

PY - 2007

Y1 - 2007

N2 - The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h- PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000A&̊) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.

AB - The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h- PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000A&̊) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.

KW - Flexible display

KW - Microcontact printing

KW - OTFT

KW - PDMS stamp

KW - Printed electronics

KW - SAM

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DO - 10.4028/0-87849-463-4.661

M3 - Conference article

AN - SCOPUS:57649083580

SN - 1022-6680

VL - 24-25

SP - 661

EP - 664

JO - Advanced Materials Research

JF - Advanced Materials Research

T2 - PRICM 6: The 6th Pacific Rim International Conference on Advanced Materials and Processing

Y2 - 5 November 2007 through 9 November 2007

ER -

Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing

Abstract

Keywords

ASJC Scopus subject areas

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