Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Y. Kanamori; T. Kobayashi; K. Hane

doi:10.1109/IMNC.2007.4456263

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

Y. Kanamori, T. Kobayashi, K. Hane

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 μm, approximately 4.2° of the diffraction angle changing was observed. Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tbhoku University, Japan.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	380-381
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456263
Publication status	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Conference

Conference	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	07/11/5 → 07/11/8

Access to Document

10.1109/IMNC.2007.4456263

Cite this

Kanamori, Y., Kobayashi, T., & Hane, K. (2007). Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 380-381). Article 4456263 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456263

Kanamori, Y. ; Kobayashi, T. ; Hane, K. / Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 380-381 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

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title = "Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators",

abstract = "We have fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 μm, approximately 4.2° of the diffraction angle changing was observed. Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tbhoku University, Japan.",

author = "Y. Kanamori and T. Kobayashi and K. Hane",

year = "2007",

doi = "10.1109/IMNC.2007.4456263",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "380--381",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Kanamori, Y, Kobayashi, T & Hane, K 2007, Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456263, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 380-381, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456263

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators. / Kanamori, Y.; Kobayashi, T.; Hane, K.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 380-381 4456263 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

AU - Kanamori, Y.

AU - Kobayashi, T.

AU - Hane, K.

PY - 2007

Y1 - 2007

N2 - We have fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 μm, approximately 4.2° of the diffraction angle changing was observed. Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tbhoku University, Japan.

AB - We have fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 μm, approximately 4.2° of the diffraction angle changing was observed. Part of this work was performed at the Micro/Nano-Machining Research and Education Center, Tbhoku University, Japan.

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DO - 10.1109/IMNC.2007.4456263

M3 - Conference contribution

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SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 380

EP - 381

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Kanamori Y, Kobayashi T, Hane K. Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 380-381. 4456263. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456263

Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators

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