Fabrication of proton conductor SrCeO3 thin films by excimer laser deposition

H. Yugami; H. Naito; H. Arashi; M. Ishigame

doi:10.1016/0167-2738(96)00306-2

Fabrication of proton conductor SrCeO₃ thin films by excimer laser deposition

H. Yugami, H. Naito, H. Arashi, M. Ishigame

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Thin films of a perovskite proton conductor SrCeO₃ were fabricated by ArF excimer laser deposition method using bulk SrCeO₃ ceramic targets. For incident laser fluences greater than ∼ 1 J/cm², ablative deposition was observed. SrCeO₃ films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600°C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.

Original language	English
Pages (from-to)	1307-1310
Number of pages	4
Journal	Solid State Ionics
Volume	86-88
Issue number	PART 2
DOIs	https://doi.org/10.1016/0167-2738(96)00306-2
Publication status	Published - 1996 Jul

Keywords

Laser deposition
Proton conductor
Raman
SrCeO

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)
Condensed Matter Physics

Access to Document

10.1016/0167-2738(96)00306-2

Cite this

@article{a11676deb6d04b5a9566577159c51dbd,

title = "Fabrication of proton conductor SrCeO3 thin films by excimer laser deposition",

abstract = "Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than ∼ 1 J/cm2, ablative deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600°C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.",

keywords = "Laser deposition, Proton conductor, Raman, SrCeO",

author = "H. Yugami and H. Naito and H. Arashi and M. Ishigame",

note = "Funding Information: The authors would like to thank Dr. T. Yajima (TYK Corporation) for providing the ceramics targets. The authors are indebted to Mr. M. Chiba (Faculty of Eng., Tohoku Univ.) and Mr. Y. Chiba (RISM, Tohoku Univ.) for his assistance with the experiments. This work is partly supported by a Grant-in-Aid for Scientific Research (#07750736) from the Ministry of Education, Science, Sports and Culture of Japan.",

year = "1996",

month = jul,

doi = "10.1016/0167-2738(96)00306-2",

language = "English",

volume = "86-88",

pages = "1307--1310",

journal = "Solid State Ionics",

issn = "0167-2738",

publisher = "Elsevier",

number = "PART 2",

}

TY - JOUR

T1 - Fabrication of proton conductor SrCeO3 thin films by excimer laser deposition

AU - Yugami, H.

AU - Naito, H.

AU - Arashi, H.

AU - Ishigame, M.

N1 - Funding Information: The authors would like to thank Dr. T. Yajima (TYK Corporation) for providing the ceramics targets. The authors are indebted to Mr. M. Chiba (Faculty of Eng., Tohoku Univ.) and Mr. Y. Chiba (RISM, Tohoku Univ.) for his assistance with the experiments. This work is partly supported by a Grant-in-Aid for Scientific Research (#07750736) from the Ministry of Education, Science, Sports and Culture of Japan.

PY - 1996/7

Y1 - 1996/7

N2 - Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than ∼ 1 J/cm2, ablative deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600°C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.

AB - Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than ∼ 1 J/cm2, ablative deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600°C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.

KW - Laser deposition

KW - Proton conductor

KW - Raman

KW - SrCeO

UR - http://www.scopus.com/inward/record.url?scp=0030182453&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030182453&partnerID=8YFLogxK

U2 - 10.1016/0167-2738(96)00306-2

DO - 10.1016/0167-2738(96)00306-2

M3 - Article

AN - SCOPUS:0030182453

SN - 0167-2738

VL - 86-88

SP - 1307

EP - 1310

JO - Solid State Ionics

JF - Solid State Ionics

IS - PART 2

ER -