Fabrication of proton conductor SrCeO3 thin films by excimer laser deposition

H. Yugami, H. Naito, H. Arashi, M. Ishigame

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than ∼ 1 J/cm2, ablative deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600°C. We have found that the oxygen pressure during deposition is the most critical parameter for obtaining oriented films.

Original languageEnglish
Pages (from-to)1307-1310
Number of pages4
JournalSolid State Ionics
Issue numberPART 2
Publication statusPublished - 1996 Jul


  • Laser deposition
  • Proton conductor
  • Raman
  • SrCeO

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics


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